Customization: | Available |
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Application: | Semi Standard |
Material: | Compound Semiconductor |
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Item | Specification | ||
Diameter | 150mm | 200mm | 300mm |
Type | P/N | P/N | P/N |
Notch | SEMI/JEIDA | Notch/OF | Notch |
Thickness(μm) | 675±25/625±25 | 725±25 | 725±25 |
Surface | Polished | Polished | Polished |
Inside | Etched | Etched | Etched |
Package | CoinRoll | CoinRoll | CoinRoll |
150MM/200MM Test Wafer: Our meticulously crafted test wafers in the 150MM and 200MM sizes provide exceptional quality and reliability for your testing needs.
150MM | ||
SPEC | 0.2um≤30ea | |
Diameter(mm) | 150±0.2mm | |
Type | P | |
Olyfra length | 57.5mm±2.5mm | 47.5mm±2.5mm |
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | SEMI | JEIDA |
675um±25um | 675um±25um | |
TTV(μm) | ≤30um | |
BOW(μm) | ≤40um | |
WARP(μm) | ≤40um | |
Surface impurity | ≤5.0E 10 atom/cm² |
200MM | ||
SPEC | 0.2um≤30ea | - |
Diameter(mm) | 200±0.2mm | |
Type | P | |
Crystal orientation | <110>±1 | |
Notch direction | ||
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | 725um±25um | |
TTV(μm) | ≤25um | ≤2um |
BOW(μm) | ≤40um | |
WARP(μm) | ||
LM | NO | |
Surface impurity | ≤5.0E 10 atom/cm² |
300MM | ||||
SPEC | 0.045um≤50ea | 0.065um≤50ea | 0.09um<50ea | 0.12um<50ea |
Manufacturing method | CZ | |||
Diameter(mm) | 300±0.2mm | |||
Type/Dopant | P/Boron | |||
Crystal orientation | <100>±1 | |||
Notch direction | ||||
Resistance value (Ω·cm) | 1-100 | |||
Thickness(μm) | 775±25 | |||
TTV(μm) | ≤10 | |||
BOW(μm) | ≤40 | |||
WARP(μm) | ||||
LM | T7+ OCR | |||
Surface impurity | <1 E10 Atoms/cm² |
200MM | 300MM | |
Oxide thickness | 500±25nm | |
Variation in oxide thickness (for one wafer) |
<3% | |
Variation in oxide thickness (for multiple wafers) |
<3% | |
SPEC | 0.2μm≤30ea | |
Diameter(mm) | 200±0.2mm | 300±0.2mm |
Type | P | |
Crystal orientation | <100>±1 | |
Notch direction | <100>±1 | |
Resistance value (Ω ·cm) | 1-100 | |
Thickness(μm) | 725±25 | |
TTV(μm) | ≤25 | ≤10 |
BOW(μm) | ≤40 | |
WARP(μm) | ≤40 | |
Surface impurity | ≤5.0 E10 Atom/cm² | <1 E10 Atoms/cm² |
Q: What's the way of shipping?
A: We provide flexible and efficient shipping solutions via renowned carriers such as DHL, FedEx, TNT, UPS, EMS, and SF, among others.
Q: How to pay?
A: We accept convenient payment options including T/T and PayPal and more.
Q: What's the delivery time?
A: For items in stock, expect a swift delivery within 5 working days.
For customized products, delivery spans from 7 to 25 working days, tailored to order quantity.
Q: Can I customize the products based on my need?
A: Absolutely! We offer customizations in material, specifications, and optical coating to perfectly suit your unique optical component requirements.
Every customer's specification is unique, and FSM is equipped to provide wafers that align precisely with your exact specifications.