Customization: | Available |
---|---|
Application: | Semi Standard |
Material: | Compound Semiconductor |
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Item | Specification | ||
Diameter | 150mm | 200mm | 300mm |
Type | P/N | P/N | P/N |
Notch | SEMI/JEIDA | Notch/OF | Notch |
Thickness(μm) | 675±25/625±25 | 725±25 | 725±25 |
Surface | Polished | Polished | Polished |
Inside | Etched | Etched | Etched |
Package | CoinRoll | CoinRoll | CoinRoll |
150MM/200MM Precision Test Wafer
150MM | ||
SPEC | 0.2um≤30ea | |
Diameter(mm) | 150±0.2mm | |
Type | P | |
Olyfra length | 57.5mm±2.5mm | 47.5mm±2.5mm |
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | SEMI | JEIDA |
675um±25um | 675um±25um | |
TTV(μm) | ≤30um | |
BOW(μm) | ≤40um | |
WARP(μm) | ≤40um | |
Surface impurity | ≤5.0E 10 atom/cm² |
200MM | ||
SPEC | 0.2um≤30ea | - |
Diameter(mm) | 200±0.2mm | |
Type | P | |
Crystal orientation | <110>±1 | |
Notch direction | ||
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | 725um±25um | |
TTV(μm) | ≤25um | ≤2um |
BOW(μm) | ≤40um | |
WARP(μm) | ||
LM | NO | |
Surface impurity | ≤5.0E 10 atom/cm² |
300MM | ||||
SPEC | 0.045um≤50ea | 0.065um≤50ea | 0.09um<50ea | 0.12um<50ea |
Manufacturing method | CZ | |||
Diameter(mm) | 300±0.2mm | |||
Type/Dopant | P/Boron | |||
Crystal orientation | <100>±1 | |||
Notch direction | ||||
Resistance value (Ω·cm) | 1-100 | |||
Thickness(μm) | 775±25 | |||
TTV(μm) | ≤10 | |||
BOW(μm) | ≤40 | |||
WARP(μm) | ||||
LM | T7+ OCR | |||
Surface impurity | <1 E10 Atoms/cm² |
200MM | 300MM | |
Oxide thickness | 500±25nm | |
Variation in oxide thickness (for one wafer) |
<3% | |
Variation in oxide thickness (for multiple wafers) |
<3% | |
SPEC | 0.2μm≤30ea | |
Diameter(mm) | 200±0.2mm | 300±0.2mm |
Type | P | |
Crystal orientation | <100>±1 | |
Notch direction | <100>±1 | |
Resistance value (Ω ·cm) | 1-100 | |
Thickness(μm) | 725±25 | |
TTV(μm) | ≤25 | ≤10 |
BOW(μm) | ≤40 | |
WARP(μm) | ≤40 | |
Surface impurity | ≤5.0 E10 Atom/cm² | <1 E10 Atoms/cm² |
Q: What are the available shipping methods you offer?
A: We offer a range of reliable shipping options, including DHL, FedEx, TNT, UPS, EMS, SF, and more.
Q: What are the accepted payment methods for transactions?
A: We accept secure payment through T/T and PayPal,and several other methods to suit your convenience.
Q: How long does delivery take for orders?
A: For in-stock items, expect delivery within a swift 5 working days.
For customized orders, delivery ranges from 7 to 25 working days, depending on your order's size and requirements.
Q: Can products be tailored to specific requirements?
A: Absolutely! We offer customization for materials, specifications, and optical coatings to perfectly suit your optical component needs.
We acknowledge that each customer's specifications are distinct, and FSM is committed to providing wafers that align with your precise demands.