Wafer Orientation :
On axis:±0.5°for 6H-N/4H-N/4H-SI/6H-SI
Off axis:4.0° toward 1120±0.5°for4H-N/4H-SI
Lead Time : 2-3 weeks
Why Choose FSM?
- Expertise : With our team of seasoned professionals and cutting-edge manufacturing facilities, Fine Silicon Manufacturing (Shanghai) Ltd. guarantees the delivery of consistently superior quality wafers, standing at the pinnacle of industry excellence.
- Wide Range of Products : From the renowned Czochralski (CZ) and Float Zone (FZ) silicon wafers to the versatile SOI and glass wafers, we present an extensive portfolio designed to satisfy your distinct requirements.
- Customization : Our specialization lies in crafting tailor-made wafers precisely per your specifications, ensuring the seamless success of your projects.
- Fast Turnaround : With streamlined processes and a well-stocked inventory, we ensure rapid delivery, keeping your projects on track and within schedule.
- Global Reach : With a robust global distribution network from our warehouses in China and Japan, we efficiently serve a vast clientele across more than 50 countries, ensuring worldwide customer satisfaction.
Dummy wafers, also known as test wafers, are primarily designed for experimental and testing purposes, distinguishing them from conventional production wafers.
As such, reclaimed wafers are predominantly utilized as dummy wafers (test wafers).
Dummy wafers are extensively used in production devices to enhance safety at the initial production stages and are vital for delivery checks and process form evaluations.
Given their frequent use in experiments and testing, the size and thickness of dummy wafers are critical factors in most circumstances.
Wafers processed with film deposition are referred to as film wafers.
Examples of films used (film growth) include isolation films for layer separation, metal films for conductivity, and process materials like resist and protective films.
Reference Values for Optimal Usage
| Item |
Specification |
| Diameter |
150mm |
200mm |
300mm |
| Type |
P/N |
P/N |
P/N |
| Notch |
SEMI/JEIDA |
Notch/OF |
Notch |
| Thickness(μm) |
675±25/625±25 |
725±25 |
725±25 |
| Surface |
Polished |
Polished |
Polished |
| Inside |
Etched |
Etched |
Etched |
| Package |
CoinRoll |
CoinRoll |
CoinRoll |
150MM/200MM Test Wafer - Exceptional Quality for Precision Testing
| 150MM |
| SPEC |
0.2um≤30ea |
| Diameter(mm) |
150±0.2mm |
| Type |
P |
| Olyfra length |
57.5mm±2.5mm |
47.5mm±2.5mm |
| Resistance value ( Ω·cm ) |
1-100 |
| Thickness(μm) |
SEMI |
JEIDA |
| 675um±25um |
675um±25um |
| TTV(μm) |
≤30um |
| BOW(μm) |
≤40um |
| WARP(μm) |
≤40um |
| Surface impurity |
≤5.0E 10 atom/cm² |
| 200MM |
| SPEC |
0.2um≤30ea |
- |
| Diameter(mm) |
200±0.2mm |
| Type |
P |
| Crystal orientation |
<110>±1 |
| Notch direction |
| Resistance value ( Ω·cm ) |
1-100 |
| Thickness(μm) |
725um±25um |
| TTV(μm) |
≤25um |
≤2um |
| BOW(μm) |
≤40um |
| WARP(μm) |
| LM |
NO |
| Surface impurity |
≤5.0E 10 atom/cm² |
300MM Test Wafer - Advanced Solutions for Accurate Results
| 300MM |
| SPEC |
0.045um≤50ea |
0.065um≤50ea |
0.09um<50ea |
0.12um<50ea |
| Manufacturing method |
CZ |
| Diameter(mm) |
300±0.2mm |
| Type/Dopant |
P/Boron |
| Crystal orientation |
<100>±1 |
| Notch direction |
| Resistance value (Ω·cm) |
1-100 |
| Thickness(μm) |
775±25 |
| TTV(μm) |
≤10 |
| BOW(μm) |
≤40 |
| WARP(μm) |
| LM |
T7+ OCR |
| Surface impurity |
<1 E10 Atoms/cm² |
200MM/300MM Oxide Wafer - Superior Performance for Your Needs
| |
200MM |
300MM |
| Oxide thickness |
500±25nm |
Variation in oxide thickness
(for one wafer) |
<3% |
Variation in oxide thickness
(for multiple wafers) |
<3% |
| SPEC |
0.2μm≤30ea |
| Diameter(mm) |
200±0.2mm |
300±0.2mm |
| Type |
P |
| Crystal orientation |
<100>±1 |
| Notch direction |
<100>±1 |
| Resistance value (Ω ·cm) |
1-100 |
| Thickness(μm) |
725±25 |
| TTV(μm) |
≤25 |
≤10 |
| BOW(μm) |
≤40 |
| WARP(μm) |
≤40 |
| Surface impurity |
≤5.0 E10 Atom/cm² |
<1 E10 Atoms/cm² |
* Please contact us for additional film types, thickness variations, and specific film compositions tailored to your requirements.
Fine Silicon Manufacturing(shanghai) Ltd.(FSM )was established in 2008 and is headquartered in Shanghai's which located in Waigaoqiao Free Trade Zone.
FSM is one of the earliest enterprises engaged in silicon wafer processing and sales in China.
In 2015, the Japanese branch KOD Corporation was established in Tokyo.
At present, FSM Group has two plants in Shanghai and Japan, with a monthly processing capacity of 100,000pcs 12inch silicon wafers.
At the sales end, FSM, KOD and upstream domestic and oversea wafer makers, wafer reclaim house and downstream semiconductor foundary have stable and good cooperation, customers all over the domestic and foreign countries and regions.
The main business also expanded from single Dummy wafer to the agent of reclaim wafer house, providing wafer reclaim business from 6 -12 inch;
At the same time, we also provide Test and Dummy wafers of various sizes from the wafer maker.
FSM also provides customized coatings wafer in various sizes and film thickness, eg: Thermal oxide, PETEOS, LP-Nitride, PE SiN etc.
In the field of third-generation semiconductors, we are also active and currently offer various sizes of SiC, lithium tantalate/lithium niobate (LiTaO3 (LT) and LiNbO3 (LN)), glass wafers, etc.
Q: What are the available shipping options?
A: We offer a variety of shipping methods including DHL, FedEx, TNT, UPS, EMS, SF, and more for your convenience.
Q: What payment methods do you accept?
A: We accept T/T and PayPal, among other options.
Q: What is the delivery timeframe?
A: For in-stock items, our delivery time is typically 5 working days.
For custom-made products, the delivery period ranges from 7 to 25 working days, depending on the quantity required.
Q: Is it possible to customize products to suit my requirements?
A: Absolutely! We offer customization for material, specifications, and optical coating to perfectly match your optical component needs.
At FSM, we understand that every customer has unique specifications, and we are equipped to provide wafers tailored to meet your exact requirements.
If the specifications you need aren't listed, pleaseCONTACT FSMto connect with our highly skilled and knowledgeable sales team.
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