Customization: | Available |
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Application: | Semi Standard |
Material: | Compound Semiconductor |
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Item | Specification | ||
Diameter | 150mm | 200mm | 300mm |
Type | P/N | P/N | P/N |
Notch | SEMI/JEIDA | Notch/OF | Notch |
Thickness(μm) | 675±25/625±25 | 725±25 | 725±25 |
Surface | Polished | Polished | Polished |
Inside | Etched | Etched | Etched |
Package | CoinRoll | CoinRoll | CoinRoll |
150MM/200MM Test Wafer: Experience precision and reliability with our high-quality silicon test wafers available in a variety of dimensions to suit your specific requirements.
150MM | ||
SPEC | 0.2um≤30ea | |
Diameter(mm) | 150±0.2mm | |
Type | P | |
Olyfra length | 57.5mm±2.5mm | 47.5mm±2.5mm |
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | SEMI | JEIDA |
675um±25um | 675um±25um | |
TTV(μm) | ≤30um | |
BOW(μm) | ≤40um | |
WARP(μm) | ≤40um | |
Surface impurity | ≤5.0E 10 atom/cm² |
200MM | ||
SPEC | 0.2um≤30ea | - |
Diameter(mm) | 200±0.2mm | |
Type | P | |
Crystal orientation | <110>±1 | |
Notch direction | ||
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | 725um±25um | |
TTV(μm) | ≤25um | ≤2um |
BOW(μm) | ≤40um | |
WARP(μm) | ||
LM | NO | |
Surface impurity | ≤5.0E 10 atom/cm² |
300MM | ||||
SPEC | 0.045um≤50ea | 0.065um≤50ea | 0.09um<50ea | 0.12um<50ea |
Manufacturing method | CZ | |||
Diameter(mm) | 300±0.2mm | |||
Type/Dopant | P/Boron | |||
Crystal orientation | <100>±1 | |||
Notch direction | ||||
Resistance value (Ω·cm) | 1-100 | |||
Thickness(μm) | 775±25 | |||
TTV(μm) | ≤10 | |||
BOW(μm) | ≤40 | |||
WARP(μm) | ||||
LM | T7+ OCR | |||
Surface impurity | <1 E10 Atoms/cm² |
200MM | 300MM | |
Oxide thickness | 500±25nm | |
Variation in oxide thickness (for one wafer) |
<3% | |
Variation in oxide thickness (for multiple wafers) |
<3% | |
SPEC | 0.2μm≤30ea | |
Diameter(mm) | 200±0.2mm | 300±0.2mm |
Type | P | |
Crystal orientation | <100>±1 | |
Notch direction | <100>±1 | |
Resistance value (Ω ·cm) | 1-100 | |
Thickness(μm) | 725±25 | |
TTV(μm) | ≤25 | ≤10 |
BOW(μm) | ≤40 | |
WARP(μm) | ≤40 | |
Surface impurity | ≤5.0 E10 Atom/cm² | <1 E10 Atoms/cm² |
Q: What's the way of shipping ?
A: We accept DHL, Fedex, TNT, UPS, EMS, SF and etc.
Q: How to pay?
A: T/T, PayPal and etc..
Q: What's the deliver time?
A: For inventory: Enjoy swift delivery within just 5 workdays.
For customized products: Delivery varies from 7 to 25 workdays, tailored to your order's quantity.
Q: Can I customize the products based on my need?
A: Absolutely! We specialize in customizing material, specifications, and optical coatings to perfectly match your unique requirements.
Every customer's specification is unique and FSM can supply wafers that meet your exact specifications.