Customization: | Available |
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Application: | Semi Standard |
Material: | Compound Semiconductor |
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Item | Specification | ||
Diameter | 150mm | 200mm | 300mm |
Type | P/N | P/N | P/N |
Notch | SEMI/JEIDA | Notch/OF | Notch |
Thickness(μm) | 675±25/625±25 | 725±25 | 725±25 |
Surface | Polished | Polished | Polished |
Inside | Etched | Etched | Etched |
Package | CoinRoll | CoinRoll | CoinRoll |
150MM/200MM Test Wafer - Precision at its Best
150MM | ||
SPEC | 0.2um≤30ea | |
Diameter(mm) | 150±0.2mm | |
Type | P | |
Olyfra length | 57.5mm±2.5mm | 47.5mm±2.5mm |
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | SEMI | JEIDA |
675um±25um | 675um±25um | |
TTV(μm) | ≤30um | |
BOW(μm) | ≤40um | |
WARP(μm) | ≤40um | |
Surface impurity | ≤5.0E 10 atom/cm² |
200MM | ||
SPEC | 0.2um≤30ea | - |
Diameter(mm) | 200±0.2mm | |
Type | P | |
Crystal orientation | <110>±1 | |
Notch direction | ||
Resistance value ( Ω·cm ) | 1-100 | |
Thickness(μm) | 725um±25um | |
TTV(μm) | ≤25um | ≤2um |
BOW(μm) | ≤40um | |
WARP(μm) | ||
LM | NO | |
Surface impurity | ≤5.0E 10 atom/cm² |
300MM | ||||
SPEC | 0.045um≤50ea | 0.065um≤50ea | 0.09um<50ea | 0.12um<50ea |
Manufacturing method | CZ | |||
Diameter(mm) | 300±0.2mm | |||
Type/Dopant | P/Boron | |||
Crystal orientation | <100>±1 | |||
Notch direction | ||||
Resistance value (Ω·cm) | 1-100 | |||
Thickness(μm) | 775±25 | |||
TTV(μm) | ≤10 | |||
BOW(μm) | ≤40 | |||
WARP(μm) | ||||
LM | T7+ OCR | |||
Surface impurity | <1 E10 Atoms/cm² |
200MM | 300MM | |
Oxide thickness | 500±25nm | |
Variation in oxide thickness (for one wafer) |
<3% | |
Variation in oxide thickness (for multiple wafers) |
<3% | |
SPEC | 0.2μm≤30ea | |
Diameter(mm) | 200±0.2mm | 300±0.2mm |
Type | P | |
Crystal orientation | <100>±1 | |
Notch direction | <100>±1 | |
Resistance value (Ω ·cm) | 1-100 | |
Thickness(μm) | 725±25 | |
TTV(μm) | ≤25 | ≤10 |
BOW(μm) | ≤40 | |
WARP(μm) | ≤40 | |
Surface impurity | ≤5.0 E10 Atom/cm² | <1 E10 Atoms/cm² |
Q: What's the way of shipping?
A: We offer a variety of shipping options to suit your needs, including leading carriers such as DHL, Fedex, TNT, UPS, EMS, and SF, among others.
Q: How to pay?
A: We provide flexible payment options like T/T and PayPal, along with other convenient methods.
Q: What's the delivery time?
A: For items in stock, expect a swift delivery time of just 5 business days.
For customized products, our delivery ranges from 7 to 25 working days, depending on your order quantity.
Q: Can I customize the products based on my needs?
A: Absolutely! We specialize in tailoring the material, specifications, and optical coatings of your optical components to fit your precise requirements.
Each customer's specification is distinct, and Fine Silicon Manufacturing (Shanghai) Ltd. is committed to providing wafers that align perfectly with your exact needs.